Design space exploration of Z-axis CMOS-MEMS accelerometers uri icon

Abstract

  • The dimensions of a CMOS-MEMS Z-axis accelerometer are varied in a parametric study that pursues to explore the design space of the spring stiffness that can be achieved by this device. The results of the spring stiffness obtained via simulation will be compared to the one obtained via analytical results, to evaluate the accuracy obtained by using the analytical formulas. © 2010 IEEE.

Publication date

  • December 1, 2010