A high-speed, bimodal, CMOS-MEMS resonant scanner driven by temperature-gradient actuators
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This work reports the experimental validation of a novel one-dimensional microscanner. The composite cantilever device implements thermoelastic resonant actuation using temperature gradients induced across two frequency-selective directions as a strategy to increase operating speed and decrease damping. The device was fabricated using 0.35-¿m CMOS technology and aspect ratio dependent etch modulation. Resonance peaks were measured around 6.4 and 44.7 kHz at atmospheric-pressure conditions; the power sensitivities (2.8 and 1.6 °/W) of the device may compromise its performance for low-power, large-angle applications. Ultimately, the device is suitable for applications requiring a variation from low- to high-stability conditions with increasing operating speed. © 2012 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).