Wafer-scale fabrication of periodic Au-hollow nanopillars for SERS applications
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© 2020 OSA - The Optical Society. All rights reserved.Combined hybrid lithography and sputter redeposition enable reproducible wafer-scale fabrication of gold hollow nanopillars with relatively large field enhancement verified both numerically and experimentally. The application of such structures is demonstrated with surfaceenhanced Raman scattering (SERS).