Q-factor Enhancement in Slow-Light Nanobeam Cavities on a Silicon Nitride Platform
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© 2020 IEEE.We show theoretically and experimentally that incorporating structured slow-light waveguides inside nanobeam cavities leads to a nonlinear dependence of the Q factor on the cavity length. We employ this effect to demonstrate Q-factor enhancement in silicon nitride nanobeam cavities despite their low refractive index contrast.