SU-8 derived novel ultra compact carbon antenna using C-MEMS technology uri icon

Abstract

  • © 2017 IEEE.A carbon microelectromechanical Systems (CMEMS) technology derived ultra-compact circular disc shaped antenna is proposed in this paper. The antenna is designed and developed on a Silicon-dioxide coated Sisubstrate (Si/SiO2) using SU-8 2007 negative photoresist, with carbon replacing the conventional metallization layer of the antenna fabricated in a class 1000 clean room. The antenna has over-all dimension of 50 × 50 × 0.53 mm3 and provides a measuredimpedance bandwidth from 139 MHz to 3.07 GHz indicating a 182.6% impedance bandwidth. Basic design steps, fabrication technology and measured impedance characteristics of the fabricated antenna is reported in this paper.

Publication date

  • October 18, 2017