abstract
- © The Editor(s) (if applicable) and The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd. 2021.Biomedical or Biological Micro-Electro-Mechanical Systems (BioMEMS) have emerged as a subset of Micro-Electro-Mechanical Systems (MEMS) for applications in biomedical research and medical microdevices. BioMEMS are defined as micro or nano-scale devices or systems used for processing, delivering, manipulating, or analyzing biological and chemical entities for biological or biomedical applications. Despite the fact that BioMEMS are hot topic nowadays, the origin of micro systems used in life sciences, such as biology and neurology, are surprisingly old. The following chapter summarizes the history and first developments in BioMEMS, as well as the advantages and applications of these technologies.